Wong, H.Y. ; Takeuchi, H. ; King, T.-J. ; Ameen, M. ; Agarwal, A.
Pub. info.:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.205-215, 2004. Pennington, NJ. Electrochemical Society
Wong, H.Y. ; Takeshi, H. ; Padilla, A. ; King, T.-J. ; Ameen, M. ; Agarwal, A.
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.179-187, 2005. Pennington, NJ. Electrochemical Society