1.

Conference Proceedings
Conference Proceedings
1. Film Formation by a New CVD Process Using Ionization of TEOS
Adachi, M. ; Hayasi, T. ; Fujimoto, T. ; Okuyama, K.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.1160-1166,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings
Conference Proceedings
2. Formation of Si02 Film and Gas-Phase Nucleation in an APCVD Process Using the TEOS/O3He System
Adachi, M. ; Okuyama, K. ; Tohge, N.
Pub. info.: Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition.  pp.306-312,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-2