1.

Conference Proceedings
Conference Proceedings
1. DOE manufacture with the DUV SLM-based Sigma7300 laser pattern generator
Bjyrnyngen, P. ; Ekberg, M. ; ystrym, T. ; Fosshaug, H.A. ; Karlsson, J. ; Bjyrnberg, C. ; Nikolajeff, F.K. ; Karlsson, M.
Pub. info.: Optical Microlithography XVII.  pp.1866-1875,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
2.

Conference Proceedings
Conference Proceedings
2. Influence of writing strategy on CD control for the spatial-light-modulator-based Sigma7300 DUV laser pattern generator
Fosshaug, H. ; Askebjer, P. ; Karlsson, J. ; Bajramovic, A. ; Xing, K. ; Eklund, R. ; Walford, J. ; Ekberg, M. ; Hogfeldt, P. ; ystrym, T.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.879-894,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376