1.

Conference Proceedings
Conference Proceedings
1. Numerical Simulation of Silicon Carbide Deposition in a Cold Wall CVD Reactor
Chaix, G. ; Dallet, A. ; Matecki, M. ; de Persis, S. ; Wang, Y. ; Teyssandier, F.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.209-215,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
2.

Conference Proceedings
Conference Proceedings
2. Influence of Carbon Precursor on the Gas-Phase Chetnistry of the Ti-C-Cl-H System
de Persis, S. ; Yeyssandier, F. ; McDaniel, A. ; Allendorf, M.D.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.75-83,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
3.

Conference Proceedings
Conference Proceedings
3. Reduction of Complex Gaseous Reaction Mechanisms Used hr the CVD Process
de Persis, S. ; Teyssandier, F.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.108-115,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
4.

Conference Proceedings
Conference Proceedings
4. Procedure and Related Tools Proposed for the Modeling of Gas-Phase Mechanisms Involved in Chemical Vapor Deposition: Application to CVD of SiC
de Persis, S. ; Dollet, A. ; Teyssandier, F.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.163-170,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8
5.

Conference Proceedings
Conference Proceedings
5. Kinetics of Gas-Phase Reactions in the N-H System
de Persis, S. ; Teyssandier, F. ; Dollet, A.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.17-24,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
6.

Conference Proceedings
Conference Proceedings
6. Emission spectroscopy, mass spectrometry, and kinetics in CH4-CO2 plasmas used for diamond deposition
Met, C. ; de Persis, S. ; Vandenbulcke, L. ; Aubry, O. ; Delfau, J. L. ; Vovelle, C. ; Lago, V.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.441-448,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09