Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.430-437, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas. pp.284-293, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas. pp.294-302, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart materials, structures, and integrated systems : 11-13 December 1997, Adelaide, Australia. pp.401-407, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of optical tomography and spectroscopy of tissue III : 24-28 January 1999, San Jose, California. pp.571-579, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom. pp.49-60, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Optics in computing 2000 : 18-23 June 2000, Quebec city, Canada. pp.41-45, 2000. Bellingham, WA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore. pp.309-314, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering