1.

Conference Proceedings
Conference Proceedings
1. Selective One-Step Chemical Etching of the Silicon Nitride/Silicon PBL Stack for 0.5 mm Device Fabrication
Ziger, D. ; Vitkavage, S. ; Eisenberg, J. ; Oberdorfer, C. ; Hughes, M.
Pub. info.: AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California.  1994.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1994
2.

Conference Proceedings
Conference Proceedings
2. A new methodology for quantifying OPC recipe accuracy [5992-180]
Ziger, D. ; Gerold, D. ; King, C. ; Amoroso, F. ; Tuttle, J. ; Lugg, R.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599258-599258,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
3.

Conference Proceedings
Conference Proceedings
3. 65nm mask CD qualification on critical features through simulation based lithography verification [5853-132]
van Adrichem, P. J. M. ; Valadez, J. ; Ziger, D. ; Gerold, D.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.380-386,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853