1.

Conference Proceedings
Conference Proceedings
1. Application of a new approach to optical proximity correction
Rosenbusch,A. ; Hourd,A.C. ; Juffermans,C.A. ; Kirsch,H. ; Lalanne,F.P. ; Maurer,W. ; Romeo,C. ; Ronse,K. ; Schiavone,P. ; Simecek,M. ; Toublan,O. ; Vermeuien,T. ; Watson,J.C. ; Ziegler,W.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.639-647,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Self-assembled and supported BLMs as an adaptive material for biotechnology
Ottova-Leitmannova,A. ; Tvarozek,V. ; Hianik,T. ; Zhou,T. ; Ziegler,W. ; Tien,H.
Pub. info.: Smart structures and materials 1996 : Smart materials technologies and biomimetics : 26 February-2 March 1996, San Diego, California.  pp.144-151,  1996.  Bellingham.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2716
3.

Conference Proceedings
Conference Proceedings
3. Development of an algorithm for monitoring pattern fidelity on photomasks for 0.2-ｦﾌm technology and beyond based on light optical CD metrology tools
Schatz,T. ; Hay,B. ; Walden,L. ; Ziegler,W.
Pub. info.: 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany.  pp.91-99,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3665
4.

Conference Proceedings
Conference Proceedings
4. Self-assembled and supported BLMs as a smart system for biosensors
Ottova,A.L. ; Hianik,T. ; Ziegler,W. ; Tvarozek,V. ; Sabo,J. ; Passechnik,V.I. ; Ivanov,S.A. ; Tien,H.
Pub. info.: Biomedical sensing, imaging, and tracking technologies II : 11-13 February 1997, San Jose, California.  pp.342-349,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2976
5.

Conference Proceedings
Conference Proceedings
5. Assessment of corner-rounding improvement by automatic software correction on laser pattern generator manufactured photomasks
Ziegler,W. ; Rosenbusch,A.
Pub. info.: 18th Annual BACUS Symposium on Photomask Technology and Management.  pp.63-73,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3546
6.

Conference Proceedings
Conference Proceedings
6. Comparison of line shortening assessed by aerial image and wafer measurements
Ziegler,W. ; Pforr,R. ; Thiele,J. ; Maurer,W.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.319-327,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236
7.

Conference Proceedings
Conference Proceedings
7. New approach to optical proximity correction
Rosenbusch,A. ; Juffermans,A.H. ; Kirsch,H. ; Lalanne,F.P. ; Maurer,W. ; Romeo,C. ; Ronse,K. ; Schiavone,P. ; Simecek,M. ; Toublan,O. ; Watson,J.C. ; Ziegler,W. ; Zimmermann,R.
Pub. info.: 18th Annual BACUS Symposium on Photomask Technology and Management.  pp.585-593,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3546