1.

Conference Proceedings
Conference Proceedings
1. Electrochemical Deposition of Manganese and Copper-Manganese Alloy on Silicon
A. Radisic ; J.L. Hernandez ; Z. Tokei ; G. Beyer ; P.M. Vereecken
Pub. info.: Electrochemical Deposition on Non-Metallic Surfaces, Patterned Substrates, and Templates.  pp.69-76,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(21)
2.

Conference Proceedings
Conference Proceedings
2. Influenece of Ta(N) Metal Gate Microstructure on Its Etch Properties
D. Shamiryan ; V. Paraschiv ; Z. Tokei ; W. Boullart
Pub. info.: Physics and technology of high-k gate dielectrics III.  pp.625-632,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(5)
3.

Conference Proceedings
Conference Proceedings
3. Study of Ni-Silicide Contacts to Si:C Source/Drain.
S. Mertens ; Y. Cho ; F. Nouri ; R. Schreutelkamp ; Y. Kim ; P. Verheyen ; J. Steenbergen ; C. Vrancken ; H. Bender ; O. Richard ; B. Van Daele ; W. Vandervorst ; P. Absil ; S. Kubicek ; C. Demeurisse ; Z. Tokei ; A. Lauwers ; L. Geenen
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment.  pp.139-148,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(2)
4.

Conference Proceedings
Conference Proceedings
4. A novel plasma-assisted shrink process to enlarge process windows of narrow trenches and contacts for 45-nm node applications and beyond
M. O. de Beeck ; J. Versluijs ; Z. Tokei ; S. Demuynck ; J. D. Marneffe ; W. Boullart ; S. Vanhaelemeersch ; H. Zhu ; P. Cirigliano ; E. Pavel ; R. Sadjadi ; J. Kim
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519