1.

Conference Proceedings
Conference Proceedings
1. Sub-0.30-ｦﾌm i-line photoresist: formulation strategy and lithographic characterization
Yu,J.J. ; Meister,C.C. ; Vizvary,G. ; Xu,C.-B. ; Fallon,P.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 2  pp.1365-1380,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
2.

Conference Proceedings
Conference Proceedings
2. Ripple formation in excimer laser-irradiated silicon dioxide/silicon system
Yu,J.J. ; Lu,Y.F.
Pub. info.: Laser processing of materials and industrial applications II : 16-19 September 1998, Beijing, China.  pp.262-268,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3550
3.

Conference Proceedings
Conference Proceedings
3. Laser-engineered rippling interfaces for developing microtextures,adherent coatings,and surface coupling
Yu,J.J. ; Lu,Y.F.
Pub. info.: Photonic Systems and Applications in Defense and Manufacturing.  pp.252-262,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3898