1.

Conference Proceedings
Conference Proceedings
1. Defect detection for short-loop process and SRAM-cell optimization by using addressable failure site-test structures(AFS-TS)
Doong, K.Y.-Y. ; Hsieh, S. ; Lin, S.C. ; Wang, J.R. ; Shen, B. ; Hung, L.J. ; Guo, J.C. ; Chen, I.C. ; Young, K.L. ; Hsu, C.C.-H.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.81-87,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings
Conference Proceedings
2. Library-based process test vehicle design framework
Doong, K.Y.-Y. ; Hung, L.-J. ; Ho, S. ; Lin, S.C. ; Young, K.L.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.188-196,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042