1.
Conference Proceedings
Goo, D.-H. ; Kim, B.-S. ; Park, J.-S. ; Yoon, K.-S. ; Lee, J.-H. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T.
Pub. info.:
Optical Microlithography XVI . Part Three pp.1296-1303, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
2.
Conference Proceedings
Song, K.Y. ; Yoon, K.-S. ; Choi, S.-J. ; Woo, S.-G. ; Han, W.-S. ; Lee, J.-J. ; Lee, S.-K. ; Noh, C.-H. ; Honda, K.
Pub. info.:
Advances in Resist Technology and Processing XIX . Part One pp.504-511, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4690
3.
Conference Proceedings
Huh, S. ; Yoon, K.-S. ; Jang, I.-Y. ; Hwang, J.-H. ; Shin, I.-K. ; Choi, S.-W. ; Han, W.-S.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XI . pp.19-27, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5446