1.

Conference Proceedings
Conference Proceedings
1. Vibration confinement of flexible structures using piezoceramic actuators
Yoon, H. -S. ; Washington, G.
Pub. info.: Smart structures and materials 2005 : Modeling, signal processing, and control : 7-9 March 2005, San Diego, California, USA.  pp.441-450,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5757
2.

Conference Proceedings
Conference Proceedings
2. Impact of mask CD error on wafer CD error at low-k1 photolithography
Kim, B. -G. ; Choi, S. -W. ; Choi, J. -H. ; Chun, C. -U. ; Yoon, H. -S. ; Sohn, J. -M.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.572-578,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
3.

Conference Proceedings
Conference Proceedings
3. Evaluation of the attenuated PSM performance as the shifter transmittance and illumination systems
Kim, Y. -H. ; Park, J. -H. ; Lee, K. -H. ; Choi, S. -W. ; Yoon, H. -S. ; Sohn, J. -M.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.332-339,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
4.

Conference Proceedings
Conference Proceedings
4. Analysis of in-field uniformity on wafer considering exposure margin and MEEF
Cha, B. -C. ; Kim, S. -Y. ; Kim, S. -H. ; Yu, S. -Y. ; Jeon, C. -U. ; Yoon, H. -S. ; Han, W. -S.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.1368-1376,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567