1.

Conference Proceedings
Conference Proceedings
1. Influence of intermetal dielectric thickness on overlay mark size variation in photolithography
Lee,S.-J. ; Yoo,J.-Y. ; Kim,Y.-C. ; Kim,H. ; Nam,J.-L. ; Chung,U.-I. ; Kang,G.-W. ; Han,W.-S.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.195-204,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
2.

Conference Proceedings
Conference Proceedings
2. Method for prevention of unopened contact hole in dual-damascene process
Lyu,G.-H. ; Kim,C.-H. ; Lee,S.-J. ; Yang,H.-H. ; Lee,D.-Y. ; Yoo,J.-Y. ; Lee,J.-W. ; Kim,Y.-H. ; Nam,J.-L. ; Han,W.-S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.22-31,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344