Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.733-738, 1993. Pittsburgh, Pa.. Materials Research Society
Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium. pp.330-337, 2003. Pennington, N.J.. Electrochemical Society
Setokubo, T. ; Nakano, E. ; Aizawa, K. ; Miyoshi, H. ; Yamamoto, I. ; Fukada, T. ; Yoo, W.S.
Pub. info.:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.135-144, 2004. Pennington, NJ. Electrochemical Society
Rapid thermal and other short-time processing technologies : proceedings of the international symposium. pp.355-362, 2000. Pennington, NJ. Electrochemical Society
Fukada, T. ; Yoo, W.S. ; Hiraga, Y. ; Kang, K. ; Kitayama, H.
Pub. info.:
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium. pp.113-120, 2001. Pennington, NJ. Electrochemical Society
Yoo, W.S. ; Fukada, T. ; Hiraga, Y. ; Kang, K. ; Yamamoto, J.
Pub. info.:
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium. pp.401-408, 2001. Pennington, NJ. Electrochemical Society
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.3-10, 2004. Pennington, NJ. Electrochemical Society
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.111-118, 2003. Pennington, NJ. Electrochemical Society
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.76-82, 2005. Pennington, NJ. Electrochemical Society
Rapid thermal and other short-time processing technologies III : proceedings of the international symposium. pp.253-260, 2002. Pennington, NJ. Electrochemical Society