1.

Conference Proceedings
Conference Proceedings
1. Simulation benchmarking for the whole resist process
Kim, S.-K. ; Lee, J.-E. ; Park, S.-W. ; Yoo, J.-Y. ; Oh, H.-
Pub. info.: Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA.  pp.58-64,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5378
2.

Conference Proceedings
Conference Proceedings
2. Resist distribution effect of spin coating
Kim, S.-K. ; Yoo, J.-Y. ; Oh, H.-K.
Pub. info.: Optical Microlithography XV.  Part Two  pp.785-789,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
3.

Conference Proceedings
Conference Proceedings
3. CD prediction by threshold energy resist model (TERM)
Yoo, J.-Y. ; Kwon, Y.-K. ; Park, J.-T. ; Sohn, D.-S. ; Kim, S.-G. ; Sohn, Y.-S. ; Oh, H.-K.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1287-1295,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
4.

Conference Proceedings
Conference Proceedings
4. Extraction of exposure parameters by using neural networks
Jeon, K.-A. ; Kim, H.-H. ; Yoo, J.-Y. ; Park, J.-T. ; Oh, H.-K.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1105-1114,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
5.

Conference Proceedings
Conference Proceedings
5. A Simple optical system parameter optimization method by comparing the critical dimension
Ha, M.-A. ; Sohn, D.-S. ; Jun, K.-A. ; Yoo, J.-Y. ; Oh, H.-K. ; Kim, J. ; Park, I.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1115-1123,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039