Nakabayasbi, Y. ; Osman, H.I. ; Toyonaga, K. ; Yokota, K. ; Matsumoto, S. ; Murota, J. ; Wada, K. ; Abe, T.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.241-247, 2002. Pennington, NJ. Electrochemical Society
Yokota, K. ; Sunagawa, Y. ; Miyashita, F. ; Hirao, T. ; Horino, Y. ; Satho, M. ; Ando, Y. ; Matsuda, K.
Pub. info.:
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.556-564, 1993. Pennington, NJ. Electrochemical Society
Tagawa, M. ; Muromoto, M. ; Hachiue, S. ; Yokota, K. ; Ohmae, N. ; Matsumoto, K. ; Suzuki, M.
Pub. info.:
10th European Space Mechanisms and Tribology Symposium, 24-26 September 2003, San Sebastián, Spain. pp.311-314, 2003. Noordwijk, The Netherlands. ESA Publications Division
Nakabayasbi, Y. ; Osman, H.I. ; Toyonaga, K. ; Yokota, K. ; Matsumoto, S. ; Murota, J. ; Wada, K. ; Abe, T.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.241-247, 2002. Pennington, NJ. Electrochemical Society