1.

Conference Proceedings
Conference Proceedings
1. Applied electrostatic parallelogram actuators for microwave switches by standard CMOS process
Yen,K. ; Chang,C. ; Chang,P. ; Chiou,J. ; Chen,J. ; Lin,H.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.1022-1029,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
2.

Conference Proceedings
Conference Proceedings
2. High-aspect-ratio fine-line metallization
Chag,C. ; Chang,P. ; Yen,K. ; Lu,S.
Pub. info.: Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California.  pp.357-363,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3511
3.

Conference Proceedings
Conference Proceedings
3. Integrated eyeball-tracking device
Chen,H. ; Yen,K. ; Chio,J. ; Huang,H. ; Dai,C. ; Chang,C. ; Chang,P.
Pub. info.: Optoelectronic Materials and Devices II.  pp.637-645,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4078
4.

Conference Proceedings
Conference Proceedings
4. Fabrication of a micromachined optical modulator using the CMOS process
Chen,H. ; Yen,K. ; Huang,H. ; Chio,J. ; Dai,C. ; Chang,C. ; Chang,P.
Pub. info.: Optoelectronic Materials and Devices II.  pp.620-626,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4078
5.

Conference Proceedings
Conference Proceedings
5. Fabrication of diffractive optical elements using the CMOS process
Chen,H. ; Huang,H. ; Yen,K. ; Chio,J. ; Dai,C. ; Chang,C. ; Chang,P.
Pub. info.: Optoelectronic Materials and Devices II.  pp.627-636,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4078
6.

Conference Proceedings
Conference Proceedings
6. Wideband microwave switch by micromachining techniques
Chang,C. ; Chang,P. ; Yen,K. ; Lu,S.-S
Pub. info.: Micromachined Devices and Components IV.  pp.229-236,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514
7.

Conference Proceedings
Conference Proceedings
7. Design and experiment of microelectrode arrays for deformable membrane mirror
Chang,C. ; Chang,P. ; Yen,K.
Pub. info.: Microelectronic Structures and MEMS for Optical Processing IV.  pp.95-105,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3513
8.

Conference Proceedings
Conference Proceedings
8. Fabrication of micromachined microwave couplers by CMOS process
Chang,C. ; Chio,J. ; Yen,K. ; Chang,P. ; Lu,S.-S.
Pub. info.: Micromachined Devices and Components IV.  pp.393-402,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514