1.

Conference Proceedings
Conference Proceedings
1. AFM OBSERVATION OF Si (100) SURFACE AFTER HYDROGEN ANNEALING AND WET CHEMICAL PROCESSING
Yanase, Y. ; Horie, H. ; Oka, Y. ; Sano, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.546-553,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
2.

Conference Proceedings
Conference Proceedings
2. True Atomic Resolution Imaging on Semiconductor Surfaces with Noncontact Atomic Force Microscopy
Sugawara, Y. ; Ueyama, H. ; Uchihashi, T. ; Ohta, M. ; Yanase, Y. ; Shigematsu, T. ; Suzuki, M. ; Morita, S.
Pub. info.: Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.15-,  1997.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 442