1.

Conference Proceedings

Conference Proceedings
Shibahara, M. ; Yamamura, K. ; Sano, Y. ; Sugiyama, T. ; Endo, K. ; Mori, Y.
Pub. info.: Optical manufacturing and testing VI : 31 July-1 August 2005, San Diego, California, USA.  pp.58690I-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5869
2.

Conference Proceedings

Conference Proceedings
Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA.  pp.105-111,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5193
3.

Conference Proceedings

Conference Proceedings
Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Shimura, M. ; Ishizaka, Y.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA.  pp.11-17,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5193
4.

Conference Proceedings

Conference Proceedings
Matsuyama, S. ; Mimura, H. ; Yumoto, H. ; Hara, H. ; Yamamura, K. ; Sano, Y. ; Endo, K. ; Mori, Y. ; Nishino, Y. ; Tamasaku, K. ; Yabashi, M. ; Tshikawa, T. ; Yamauchi, K.
Pub. info.: Laser-generated, synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II : 2-4 August 2005, San Diego, California, USA.  pp.591804-591804,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5918
5.

Conference Proceedings

Conference Proceedings
Matsuyama, S. ; Mimura, H. ; Shimura, M. ; Yumoto, H. ; Katagishi, K. ; Handa, S. ; Shibatani, A. ; Sano, Y. ; Yamamura, K. ; Nishino, Y. ; Tamasaku, K. ; Yabashi, M. ; Ishikawa, T. ; Yamauchi, K.
Pub. info.: Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA.  pp.631719-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6317
6.

Conference Proceedings

Conference Proceedings
Higashi, Y. ; Takaie, Y. ; Endo, K. ; Kume, T. ; Enami, K. ; Yamauchi, K. ; Yamamura, K. ; Sano, H. ; Ueno, K. ; Mori, Y.
Pub. info.: Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA.  pp.592107-592107,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5921
7.

Conference Proceedings

Conference Proceedings
Mimura, H. ; Yumoto, H. ; Matsuyama, S. ; Yamamura, K. ; Sano, Y. ; Endo, K. ; Mori, Y. ; Nishino, Y. ; Tabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Yamauchi, Y.
Pub. info.: Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA.  pp.59210M-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5921
8.

Conference Proceedings

Conference Proceedings
Higashi, Y. ; Takaie, Y. ; Endo, K. ; Kume, T. ; Enami, K. ; Yamauchi, K. ; Yamamura, K. ; Sano, H. ; Uchikoshi, J. ; Ueno, K. ; Mori, Y.
Pub. info.: Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA.  pp.63170B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6317
9.

Conference Proceedings

Conference Proceedings
Yamamura, K. ; Mimura, H. ; Yamauchi, K. ; Sano, Y. ; Saito, A. ; Kinoshita, T. ; Endo, K. ; Mori, Y. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T.
Pub. info.: X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA.  pp.265-270,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4782
10.

Conference Proceedings

Conference Proceedings
Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Kanaoka, M. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Mori, Y.
Pub. info.: X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA.  pp.271-276,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4782