1.

Conference Proceedings
Conference Proceedings
1. Nanometer-level metrology with a low-voltage CD SEM
Yoshimura,T. ; Ezumi,M. ; Otaka,T. ; Todokoro,H. ; Yamamoto,J. ; Terasawa,T.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.61-70,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Conference Proceedings
Conference Proceedings
2. Contrast-boosted resist using a polarity-change reaction during aqueous base development
Uchino,S. ; Ueno,T. ; Migitaka,S. ; Yamamoto,J. ; Tanaka,T.P. ; Murai,F. ; Shiraishi,H. ; Hashimoto,M.
Pub. info.: Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California.  pp.438-447,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2724
3.

Conference Proceedings
Conference Proceedings
3. Negative resists for electron-beam lithography utilizing acid-catalyzed intramolecular dehydration of phenylcarbinol
Migitaka,S. ; Uchino,S. ; Ueno,T. ; Yamamoto,J. ; Kojima,K. ; Hashimoto,M. ; Shiraishi,H.
Pub. info.: Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California.  pp.613-619,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2724
4.

Technical Paper
Technical Paper
4. Poly-Si TFT Active Matrix Fluorescent Indicator Panel
Akiyama,T. ; Yamamoto,J. ; Saeki,H. ; Sera,K. ; Okumura,F. ; Asada,H. ; Kaneko,S.
Pub. info.: Vehicle information systems and electronic display technology.  pp.87-92,  1991.  Society of Automotive Engineering, Inc.
Title of ser.: SAE special publication
Ser. no.: SP-858