1.

Conference Proceedings
Conference Proceedings
1. Experimental Study of Degradation of Mechanical Strength of Silicon Wafer Caused by LSI processes
Yagishita, A. ; Fujii, O. ; Numano, M. ; Kawamura, N. ; Iwase, M. ; Ushiku, Y. ; Arikado, T.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.441-451,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-12
2.

Conference Proceedings
Conference Proceedings
2. A Transmission Positron Microscope and a Scanning Positron Microscope Being Built at KEK, Japan
Doyama, M. ; Inoue, M. ; Kogure, Y. ; Kurihara, T. ; Yagishita, A. ; Shidara, T. ; Nakahara, K. ; Hayashi, Y. ; Yoshiie, T. ; Tsuno, K.
Pub. info.: Positron annihilation, ICPA-12 : Proceedings of the 12th International Conference on Positron Annihilation, August 6-12, 2000, München, Germany.  pp.439-441,  2001.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 363-365