1.

Conference Proceedings
Conference Proceedings
1. Diffraction feature of microlens array with a small aperture size
S. Park ; J. Park ; H. Choi ; Y.-J. Yun ; K. Choi
Pub. info.: Emerging lithographic technologies XII.  2  pp.69212O-1-69212O-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921
2.

Conference Proceedings
Conference Proceedings
2. Investigation of mechanism of pattern deformation on TiN substrate and O2 plasma effect without BARC
J. Moon ; Y.-J. Yun ; T. Yang ; K. Choi ; J.-H. Kim
Pub. info.: Optical Microlithography XXI.  3  pp.69244G-1-69244G-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
3.

Conference Proceedings
Conference Proceedings
3. Impact of assistance feature to pattern profile for isolated feature in sub-65 nm node
M. Kim ; Y.-J. Yun ; E. Jeong ; K. Choi ; J. Kim
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.69221K-1-69221K-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
4.

Conference Proceedings
Conference Proceedings
4. Impact of surface treatment on resist reflow process
Y.-J. Yun ; J.-H. Park ; H. Choi ; S. R. Park ; K. Choi
Pub. info.: Advances in resist materials and processing technology XXV.  2  pp.69233K-1-69233K-6,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6923