1.

Conference Proceedings
Conference Proceedings
1. High-resolution repair of photomasks using a deep-UV-laser-based defect repair system
J.W. Herman ; Y.-H. Chuang ; B. Yang ; M. Wang ; S. Palese
Pub. info.: Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V : 20-21 February 1995, Santa Clara, California.  pp.264-275,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2437
2.

Conference Proceedings
Conference Proceedings
2. High-resolution UV laser repair of phase-shifting photomasks
B. Yang ; Y.-H. Chuang ; K.-C. Liu
Pub. info.: 14th annual Symposium on Photomask Technology and Management : proceedings : 14-16 September 1994, Santa Clara, California.  pp.35-49,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2322