1.

Conference Proceedings
Conference Proceedings
1. Design for manufacturability guideline development: integrated foundry approach
H. Lee ; Y.-A. Shim ; J.-Y. Choi ; K.-S. Choi ; J. Wu
Pub. info.: Photomask technology 2008.  1  pp.712221-1-712221-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
2.

Conference Proceedings
Conference Proceedings
2. Combination of rule and pattern based lithography unfriendly pattern detection in OPC flow
J. H. Kang ; J.-Y. Choi ; Y.-A. Shim ; H.-S. Lee ; B. Su
Pub. info.: Photomask technology 2008.  1  pp.71221N-1-71221N-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
3.

Conference Proceedings
Conference Proceedings
3. Full chip compensation for local-flare-induced CD error using OPC/DRC method
J.-Y. Choi ; Y.-A. Shim ; K.-H. Yun ; J.-D. Kim ; J.-H. Kim
Pub. info.: Optical Microlithography XXI.  3  pp.69243L-1-69243L-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924