1.

Technical Paper

Technical Paper
H. Sung ; S. Yoon ; H. Yeom ; J. Kim ; Y. Ko ; Y. Kim ; S. Oh
Pub. info.: AIAA meeting papers on disc.  2008.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2008
2.

Conference Proceedings

Conference Proceedings
Y. Ko ; K. Yamada ; T. Ushiki
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518