1.

Conference Proceedings
Conference Proceedings
1. Carbon deposition on multi-layer mirrors by extreme ultra violet ray irradiation
S. Matsunari ; T. Aoki ; K. Murakami ; Y. Gomei ; S. Terashima ; H. Takase ; M. Tanabe ; Y. Watanabe ; Y. Kakutani ; M. Niibe ; Y. Fukuda
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
2.

Conference Proceedings
Conference Proceedings
2. Long-term durability of a Ru capping layer for EUVL projection optics by introducing ethanol
Y. Kakutani ; M. Niibe ; Y. Gomei ; H. Takase ; S. Terashima ; S. Matsunari ; T. Aoki ; Y. Fukuda
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
3.

Conference Proceedings
Conference Proceedings
3. EUVL mask dual pods to be used for mask shipping and handling in exposure tools
Y. Gomei ; K. Ota ; J. Lystad ; D. Halbmair ; L. He
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517