1.

Conference Proceedings
Conference Proceedings
1. Virtual OPC at hyper NA lithography
S. Lee ; S. Kim ; Y. Chun ; S. Suh ; Y. Jang ; S. Choi ; W. Han
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. Three-dimensional mask effect approximate modeling for sub-50-nm node device OPC
S. Suh ; S. Lee ; K. Back ; Y. Kim ; S. Kim ; Y. Chun
Pub. info.: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
3.

Conference Proceedings
Conference Proceedings
3. Optimization of mask manufacturing rule check constraint for model based assist feature generation
S. Shim ; Y. Kim ; Y. Chun ; S. Lee
Pub. info.: Lithography Asia 2008.  2  pp.714030-1-714030-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
4.

Conference Proceedings
Conference Proceedings
4. Nanometric material removal using the electrokinetic phenomenon
L. C. Seng ; T. L. Biackburn ; S. H. Ng ; Y. Chun ; D. L. Butler
Pub. info.: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia.  pp.680028-1-680028-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6800