1.

Conference Proceedings

Conference Proceedings
Michel T. Ignat ; Sabine Lay ; Francine Roussel d'Herbey ; Cedric Seguineau ; Christophe Malhaire ; Jean Michel Desmarres ; Xavier Lafontan ; Sebastiano Brida
Pub. info.: Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A..  pp.217-222,  2009.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1139
2.

Conference Proceedings

Conference Proceedings
Cedric Seguineau ; Adrien Broue ; Fabienne Pennec ; Jérémie Dhennin ; Jean-Michel Desmarres ; Arnaud Pothier ; Xavier Lafontan ; Michel Ignat
Pub. info.: Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A..  pp.235-240,  2007.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1052