Michel T. Ignat ; Sabine Lay ; Francine Roussel d'Herbey ; Cedric Seguineau ; Christophe Malhaire ; Jean Michel Desmarres ; Xavier Lafontan ; Sebastiano Brida
Pub. info.:
Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A.. pp.217-222, 2009. Warrendale, Pa.. Materials Research Society
Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.. pp.235-240, 2007. Warrendale. Materials Research Society