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19 results

Conference Proceedings

1. IN SITU STUDIES OF ELECTRON CYCLOTRON RESONANCE PLASMA ETCHING OF SEMICONDUCTORS BY SPECTROSCOPIC ELLIPSOMETRY

Nafis, S. ; Ianno, N.J. ; Snyder, Paul G. ; Woollam, John A. ; Johs, Blaine

Pub. info.:	Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.819-824, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	279

Conference Proceedings

2. IN SITU SPECTROSCOPIC ELLIPSOMETRY FOR REAL TIME SEMICONDUCTOR GROWTH MONITOR

Johs Blaine ; Meyer, Duane ; Cooney, Gerald ; Yao, Huade ; Snyder, Paul G. ; Woollam, John A. ; Edwards, John ; Maracas, George

Pub. info.:	Long-wavelength semiconductor devices, materials, and processes : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.. pp.459-464, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	216

Conference Proceedings

3. REFLECTION OF POLARIZED LIGHT FROM MULTIPLY OVERCOATED MAGNETO-OPTIC MATERIALS: A SIMPLIFIED ANALYSIS METHOD

McGahan, William A. ; Woollam, John A.

Pub. info.:	Materials for magneto-optic data storage : symposium held April 25-26, 1989, San Diego, California, U.S.A.. pp.255-256, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	150

Conference Proceedings

4. REAL-TIME ANALYSIS OF IN-SITU SPECTROSCOPIC ELLIPSOMETRIC DATA DURING MBE GROWTH OF III-V SEMICONDUCTORS

Johs, B. ; Edwards, J. L. ; Shiralagi, K. T. ; Droopad, R. ; Choi, K. Y. ; Maracas, G. N. ; Meyer, D. ; Cooney, G. T. ; Woollam, John A.

Pub. info.:	Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A.. pp.75-80, 1991. Pittsburgh. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	222

Conference Proceedings

5. ATOMIC OXYGEN PLASMA EFFECTS ON CVD DEPOSITED DIAMOND-LIKE CARBON FILMS

Hale, Jeffrey S. ; Synowicki, R. A. ; Nafis, S. ; Woollam, John A.

Pub. info.:	Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.307-312, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	236

Conference Proceedings

6. SUBSTRUCTURE-MAGNETIC PROPERTY CORRELATION IN Co/Ag COMPOSITE THIN FILMS

Reed, C. P. ; Deanelis, R. J. ; Liou, S. H. ; Nafis, S. ; Woollam, John A. ; Lee, K. W. ; Jacob, R. J.

Pub. info.:	Magnetic surfaces, thin films, and multilayers : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A.. pp.329-334, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	231

Conference Proceedings

7. CHARACTERIZATION OF AN ASYMMETRIC TRIANGULAR MULTIPLE QUANTUM WELL, BY VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY

Herzinger, Craig M. ; Snyder, Paul G. ; Woollam, John A. ; Evans, Keith ; Stutz, C.E. ; Jones, R. ; Merkel, K.G. ; Reynolds, D.C.

Pub. info.:	Layered structures : heteroepitaxy, superlattices, strain, and metastability : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.719-726, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	160

Conference Proceedings

8. STUDIES OF THE EARLY OXIDATION OF SILICON (111) IN ATOMIC OXYGEN

De, Bhola N. ; Hruska, Jane ; Peterkin, Jane ; Zhao, Yong ; Woollam, John A.

Pub. info.:	Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.965-968, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	163

Conference Proceedings

9. GaAs(100) SURFACE MODIFICATIONS AT ELEVATED TEMPERATURES, STUDIED BY IN-SITU SPECTROSCOPIC ELLIPSOMETRY

Yao, Huade ; Snyder, Paul G. ; Woollam, John A.

Pub. info.:	Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A.. pp.339-346, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	202

10.

Conference Proceedings

10. *VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY (VASE FOR THE STUDY OF ION-BEAM -AND GROWTH MODIFIED SOLIDS

Woollam, John A. ; Snyder, Paul G. ; Rost, M. C.

Pub. info.:	Materials modification and growth using Ion beams : symposium held April 21-23, 1987, Anaheim, California, U.S.A.. pp.203-214, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	93

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