1.

Conference Proceedings
Conference Proceedings
1. IMPROVEMENTS IN RAPID THERMAL OXIDE/RE-OXIDIZED NITRIDED OXIDE (ONO) FILMS USING NF3
Cable, James S. ; Liao, Jimmy ; Woo, Jason C. S.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.403-408,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
2.

Conference Proceedings
Conference Proceedings
2. A Novel Low Temperature Self-Aligned Ti Silicide Technology for Sub-0.18ｦﾌm CMOS Devices
Ren, L. P. ; Liu, P. ; Pan, G. Z. ; Woo, Jason C. S.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.313-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
3.

Conference Proceedings
Conference Proceedings
3. A Novel Low-Temperature Self-Aligned Ti Silicide Technology for Sub-0.18 ｦﾌm CMOS Devices
Ren, L. P. ; Liu, P. ; Pan, G. Z. ; Woo, Jason C. S.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.245-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
4.

Conference Proceedings
Conference Proceedings
4. Nickel Silicide Work Function Tuning Study In Metal-Gate CMOS Applications
Yuan, Jun ; Pan, Grant Z. ; Chao, Yu-Lin ; Woo, Jason C. S.
Pub. info.: Progress in compound semiconductor materials -- electronic and optoelectronic applications.  pp.319-326,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 829