1.

Conference Proceedings
Conference Proceedings
1. Extremely High-Density Capacitors with ALD High-k Dielectric Layers
Klootwijk, J. ; Kemmeren, A. ; Wolters, R. ; Roozeboom, F. ; Verhoeven, J. ; Van Den Heuvel, E.
Pub. info.: Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices.  pp.17-29,  2006.  Dordrecht.  Springer
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 220
2.

Conference Proceedings
Conference Proceedings
2. KEY ISSUES RELATED TO THE SELF-ALIGNED FORMATION OF CoSi2 IN A SALICIDE PROCESS
Van den Hove, L. ; Wolters, R. ; Geyselaers, M. ; De Keersmaecker, R. ; Declerck, G.
Pub. info.: Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.99-104,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 100