1.

Conference Proceedings
Conference Proceedings
1. Miniaturized MOEMS spectrometer for NIR applications [5877-20]
Grueger, H. ; Heberer, A. ; Zimmer, F. ; Wolter, A. ; Schenk, H.
Pub. info.: Optomechanics 2005 : 3-4 August 2005, San Diego, California, USA.  pp.58770J-,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5877
2.

Conference Proceedings
Conference Proceedings
2. BL Lacs from the EMSS: number-counts and implications for the luminosity function
Wolter, A.
Pub. info.: Proceedings of the 23rd ESLAB Symposium on two topics in X-ray astronomy, Bologna, Italy, 13-20 September 1989.  pp.749-752,  1989.  Noordwijk.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 296
3.

Technical Paper
Technical Paper
3. 3D multi-sensor array for surface pressure measurements on a wall mounted cylinder
Berns, A. ; Obermeier, E. ; Wolter, A. ; Leder, A.
Pub. info.: AIAA meeting papers on disc.  2009.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA Fluid Dynamics Conference
Ser. no.: 2009
4.

Conference Proceedings
Conference Proceedings
4. Scanning 2D micromirror with enhanced flatness at high frequency [6114-24]
Wolter, A. ; Klose, T. ; Hsu, S.-T. ; Schenk, H. ; Lakner, H.
Pub. info.: MOEMS Display, Imaging, and Miniaturized Microsystems IV.  pp.61140L-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6114
5.

Conference Proceedings
Conference Proceedings
5. Measures to achieve 20-nm IPL stenecil mask distortion
Hougeneder, E. ; Chalupka A. ; Lammer, T. ; Loeschner, H. ; Kamm, F.-M. ; Struck, T. ; Ehrmann, A. ; Kaesmaier, R. ; Wolter, A. ; Butschke, J. ; Irmscher, M. ; Letzkus, F. ; Springer, R.
Pub. info.: 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.23-31,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4764
6.

Conference Proceedings
Conference Proceedings
6. Damping analysis and measurement for a comb-drive scanning mirror
Sandner, T. ; Klose, T. ; Wolter, A. ; Schenk, H. ; Lakner, H. K. ; Davis, W.
Pub. info.: MEMS, MOEMS, and Micromachining.  pp.147-158,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5455
7.

Conference Proceedings
Conference Proceedings
7. Efficient simulation of light diffraction from three-dimensional EUV masks using field decomposition techniques
Erdmann, A. ; Kalus, C.K. ; Schmoeller, T. ; Wolter, A.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.482-493,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
8.

Conference Proceedings
Conference Proceedings
8. Realization of a spectrometer with micromachined scanning grating
Grueger, H. ; Wolter, A. ; Schuster, T. ; Schenk, H. ; Lakner, H.K.
Pub. info.: MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly.  pp.46-53,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4945
9.

Conference Proceedings
Conference Proceedings
9. Ion projection lithography (IPL): posters presented at the 5th International SEMATECH Next-Generation Lithography (NGL) workdhop (Invited Poster)
Kaesmaier, R. ; Loeschner, H. ; de Jager, P.W.H. ; Ehrmann, A. ; Hirscher, S. ; Kragler, K. ; Springer, R. ; Stengl, G. ; Wolter, A.
Pub. info.: 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.235-239,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4764
10.

Conference Proceedings
Conference Proceedings
10. Mask CD characterization with EUV reflectometry at the electron storage ring BESSY II
Ehrmann, A. ; Rau, J. ; Wolter, A. ; Kamm, F.-M. ; Mathuni, J. ; Scholze, F. ; Tuemmler, J. ; Ulm, G.
Pub. info.: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.71-78,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5148