1.

Conference Proceedings
Conference Proceedings
1. Stress in Silicon Due to the Formation of Self Aligned Poly-CoSi2 Lines Studied by Micro-Raman Spectroscopy
Howard, D. J. ; Wolf, I. De ; Bender, H. ; Maex, K.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.251-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
2.

Conference Proceedings
Conference Proceedings
2. Finite-Element Simulations of the Mechanical Stress in and Around Narrow TiSi2 Lines
Steegen, A. ; Wolf, I. De ; Maex, K. ; Ignat, M.
Pub. info.: Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A..  pp.227-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 518
3.

Conference Proceedings
Conference Proceedings
3. Damage Evolution and Mechanical Failure in Flip-Chip Interconnects
Soper, A. ; Wolf, I. De ; Pozza, G. ; Ignat, M. ; Parat, G.
Pub. info.: Electronic packaging materials science X : symposium held April 14-16, 1998, San Francisco, California, U.S.A..  pp.105-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 515
4.

Conference Proceedings
Conference Proceedings
4. Influence of the As and BF2 Junction Implantation on Stress Induced Defects During Ti- and Co/Ti-Silicidation
Steegen, A. ; Bender, H. ; Wolf, I. De ; Maex, K.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.15-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
5.

Conference Proceedings
Conference Proceedings
5. Residual Stresses in Tungsten Lines: Analysis of Experimental- (Micro-Raman Spectroscopy, XRD) and Numerical Results
Wolf, I. De ; Maes, H. E. ; Moffet, J. ; Ignat, M.
Pub. info.: Materials reliability in microelectronics V : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.109-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 391
6.

Conference Proceedings
Conference Proceedings
6. SSRM and SCM Observation of Modified Lateral Diffusion of As, BF2 and Sb Induced by Nitride Spacers
Eyben, P. ; Duhayon, N. ; Stuer, C. ; Wolf, I. De ; Rooyackers, R. ; Clarysse, T. ; Vandervorst, W. ; Badenes, G.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669
7.

Conference Proceedings
Conference Proceedings
7. Phase and Mechanical Stress in and Surrounding TiSi2 and CoSi2 Lines Studied by Micro-Raman Spectroscopy
Wolf, I. De ; Howard, D. J. ; Maex, K. ; Maes, H. E.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.47-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427