1.

Conference Proceedings
Conference Proceedings
1. COMPARISON OF VAPOR-PHASE AND WET CHEMICAL PRE-GATE OXIDE AND PRE-CONTACT CLEANS
Draper, C.W. ; Anyanwu, V.E. ; Eisenberg, J.H. ; Felton, G.J. ; Roy, P.K. ; Chittipeddi, S. ; Bechtold, P.F. ; Hagner, G. ; Cooper, D. ; Syverson, D. ; Witowski, B. ; Van Eck, B. ; Gordon, M.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.392-400,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
2.

Conference Proceedings
Conference Proceedings
2. VAPOR PHASE CLEANING OF POLYSILICON EMITTER AND TITANIUM SALICIDE STRUCTURES FOR 0.35 MICRON TECHNOLOGIES
Bohannon, B. ; Witowski, B. ; Barnett, J. ; Syverson, D.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.362-373,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7