Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.145-152, 1999. Warrendale, Pa.. Materials Research Society
Materials for smart systems III : symposium held November 30-December 2, 1999, Boston, Massachusetts, U.S.A.. pp.117-, 2000. Pittsburgh, PA. MRS-Materials Research Society
Rumpf, H. ; Feydt, J. ; Lewandowski, D. ; Ludwig, A. ; Winzek, B. ; Quandt, E. ; Zhao, P. ; Wuttig, M.R.
Pub. info.:
Smart structures and materials 2003 : Active materials : Behavior and mechanics : 3-6 March 2003, San Diego, California, USA. pp.191-199, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Sterzl, T. ; Winzek, B. ; Mennicken, M. ; Nagelsdiek, R. ; Keul, H. ; Hoecker, H. ; Quandt, E.
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Smart structures and materials 2003 : Active materials : Behavior and mechanics : 3-6 March 2003, San Diego, California, USA. pp.101-109, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Winzek, B. ; Schmitz, S. ; Rumpf, H. ; Sterzl, T. ; Quandt, E.
Pub. info.:
Smart structures and materials 2003 : Active materials : Behavior and mechanics : 3-6 March 2003, San Diego, California, USA. pp.110-118, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hassdorf, R. ; Feydt, J. ; Pascal, R. ; Thienhaus, S. ; Boese, M. ; Sterzl, T. ; Winzek, B. ; Moske, M.
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Thin films : stresses and mechanical properties IX : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A.. pp.465-470, 2002. Warrendale, Pa.. Materials Research Society
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