Liu, Xiang-Yang ; Windl, Wolfgang ; Masquelier, Michael P.
Pub. info.:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.181-186, 2002. Warrendale, Pa.. Materials Research Society
Stoddard, Nathan G. ; Duscher, Gerd ; Windl, Wolfgang ; Rozgonyi, George A.
Pub. info.:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.115-120, 2004. Warrendale, Pa.. Materials Research Society
Applying molecular simulation and computational chemistry : an AIChE Topical Conference, Reno, Nevada, November 4-9, 2001,. pp.362-373, 2001. New York. American Institute of Chemical Engineers
Liu, Chun-Li ; Windl, Wolfgang ; Borucji, Len ; Lu, Shifeng ; Liu, Xiang-Yang
Pub. info.:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society