1.

Conference Proceedings
Conference Proceedings
1. Application of the aberration ring test (ARTEMIS) to determine lens quality and predict its lithographic performance
Moers,M.H. ; Laan,H.van der ; Zellenrath,M. ; Boeij,W.de ; Beaudry,N.A. ; Cummings,K.D. ; Zwol,A.van ; Becht,A. ; Willekers,R.
Pub. info.: Optical Microlithography XIV.  4346  pp.1379-1387,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
2.

Conference Proceedings
Conference Proceedings
2. Aerial image measurement methods for fast aberration set-up and illumination pupil verification
Laan,H.van der ; Dierichs,M. ; Greevenbroek,H.van ; McCoo,E. ; Stoffels,F. ; Pongers,R. ; Willekers,R.
Pub. info.: Optical Microlithography XIV.  4346  pp.394-407,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346