1.

Conference Proceedings
Conference Proceedings
1. Taguchi method applied in optimization of Shipley SJR 5740 positive resist deposition
Hui,A. ; Blosiu,J.O. ; Wiberg,D.V.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 2  pp.1304-1313,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
2.

Conference Proceedings
Conference Proceedings
2. Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space
Yang,E.-H. ; Wiberg,D.V. ; Dekany,R.G.
Pub. info.: Imaging Technology and Telescopes.  pp.83-89,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4091
3.

Conference Proceedings
Conference Proceedings
3. Fine pitch grids for an x-ray solar imaging spectrometer fabricated by optical lithography and XeF2 etching
Brennen,R.A. ; Hecht,M.H. ; Wiberg,D.V. ; Manion,S.J. ; Bonivert,W.D. ; Hruby,J.M. ; Pister,K.S.J. ; Kruglick,E.
Pub. info.: Microlithography and Metrology in Micromachining.  pp.226-235,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2640
4.

Conference Proceedings
Conference Proceedings
4. Fabricating subcollimating grids for an x-ray solar imaging spectrometer using LIGA techniques
Brennen,R.A. ; Hecht,M.H. ; Wiberg,D.V. ; Manion,S.J. ; Bonivert,W.D. ; Hruby,J.M. ; Scholz,M.L. ; Stowe,T.D. ; Kenny,T.W. ; Jackson,K.H. ; Malek,C.Khan
Pub. info.: Microlithography and Metrology in Micromachining.  pp.214-225,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2640