Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.248-251, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Choi, D.-S. ; Yoo, Y.-E. ; Seo, Y. H. ; Lee, J.-H. ; Je, T.-J. ; Whang, K.-H.
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Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. pp.324-327, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering