1.

Conference Proceedings
Conference Proceedings
1. *Preparation of Cross Sectional TEM Samples Using Lithographic Techniques and Reactive Ion Etching
Wetzel, J. T. ; Kavanagh, K. L.
Pub. info.: Specimen preparation for transmission electron microscopy of materials--II : symposium held April 19-20, 1990, San Francisco, California, U.S.A..  pp.43-50,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 199
2.

Conference Proceedings
Conference Proceedings
2. THE MICROSTRUCTURE OF COPPER FILMS DEPOSITED BY E-BEAL EVAPORATION ONTO THIN POLYIMIDE FILMS
Wetzel, J. T. ; Smith, D. A,. ; Appleby-Mougham, G.
Pub. info.: Electronic packaging materials science : symposium held November 27-29, 1984, Boston, Massachusetts, U.S.A..  pp.271-276,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 40
3.

Conference Proceedings
Conference Proceedings
3. Evaluation of Copper Penetration in Low-ｦﾊ Polymer Dielectrics by Bias-Temperature Stress
Loke, A. L. S. ; Wong, S. S. ; Talwalkar, N. A. ; Wetzel, J. T. ; Townsend, P. H. ; Tanabe, T. ; Vrtis, R. N. ; Zussman, M. P. ; Kumar, D.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.535-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
4.

Conference Proceedings
Conference Proceedings
4. Integration Challenges of Inorganic Low-k (k ｡？2.5) Materials With Cu for Sub-0.25 ｦﾌm Multilevel Interconnects
Yu, K. C. ; Defilippi, J. ; Tiwari, R. ; Sparks, T. ; Smith, D. ; Olivares, M. ; Selinidis, S. ; Zhang, J. ; Junker, K. ; Braekelmann, G. ; Farkas, J. ; Lee, K. S. ; Filipiak, S. ; Lindell, M. ; Watanabe, J. K. ; Wetzel, J. T. ; Jawarani, D. ; Herrick, M. T. ; Cave, N. G. ; Hobbs, C. C.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.499-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
5.

Conference Proceedings
Conference Proceedings
5. SURFACE RELIEF AND THE ORIENTATION OF VAPOR DEPOSITED FILMS
Smith, D. A. ; Wetzel, J. T. ; Taranko, A. R.
Pub. info.: Layered structures, epitaxy, and interfaces : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A..  pp.77-82,  1985.  Pittsburgh.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 37
6.

Conference Proceedings
Conference Proceedings
6. CHARACTERIZATION OF TILT BOUNDARIES BY ULTRA HIGH RESOLUTION ELECTRON MICROSCOPY
Krakow, W. ; Wetzel, J. T. ; Smith, D. A. ; Trafas, G.
Pub. info.: Advanced photon and particle techniques for the characterization of defects in solids : symposium held November 27-29, 1984, Boston, Massachusetts, U.S.A..  pp.253-260,  1985.  Pittsburgh.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 41
7.

Conference Proceedings
Conference Proceedings
7. Evaluation of Copper Penetration in Low-K Polymer Dielectrics by Bias-Temperature Stress
Kumar, D. ; Loke, A. L. S. ; Talwalkar, N. A. ; Tanabe, T. ; Townsend, P. H. ; Vrtis, R. N. ; Wetzel, J. T. ; Wong, S. S. ; Zussman, M. P.
Pub. info.: Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.173-188,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 565
8.

Conference Proceedings
Conference Proceedings
8. Integration Challenges of Inorganic Low-K (K < 2.5) Materials With Cu for Sub-0.25)μm Multilevel Interconnects
Blumenthal, R. ; Braekelmann, G. ; Cave, N. G. ; Conner, J. ; Crabtree, P. ; Defilippi, J. ; Denning, D. ; Farkas, J. ; Filipiak, S. ; Fowler, B. W. ; Fox, R. ; Freeman, M. ; Garcia, S. ; Herrick, M. T. ; Hershey, R. ; Hobbs, C. C. ; Jawarani, D. ; Junker, K. ; Keyes, C. ; Kirksey, S. ; Lee, J. J. ; Lee, K. S. ; Lindell, M. ; Mora, R. ; Neil, T. ; Nguyen, T. ; Olivares, M. ; Pena, T. Newton. D. ; Selinidis, S. ; Sieloff, D. D. ; Smith, D. ; Sparks, T. ; Stankus, JJ. ; Tiwari, R. ; VanGompel, T. ; Watanabe, J. K. ; Weitzman, E. J. ; Wetzel, J. T. ; Yu, K. C. ; Zhang, J.
Pub. info.: Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.151-160,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 565