1.

Conference Proceedings
Conference Proceedings
1. Clean solutions to the incoming wafer quality impact on lithography process yield limits in a dynamic copper/low-k research and development environment
Lysaght,P.S. ; Ybarra,I. ; Sax,H. ; Gupta,G. ; West,M. ; Doros,T. ; Beach,J.V. ; Mello,J.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.284-293,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
2.

Conference Proceedings
Conference Proceedings
2. First infrared beamlines at the ALS:final commissioning and new end stations
McKinney,W.R. ; Martin,M.C. ; Byrd,J.M. ; Miller,R. ; Chin,M. ; Portman,G. ; Moler,E.J. ; Lauritzen,T. ; McKean,J.P. ; West,M. ; Kellogg,N. ; Zhuang,V. ; Ross,P.N. ; J.W.Ager ? ; Haller,E.E.
Pub. info.: Accelerator-based sources of infrared and spectroscopic applications : 19-20 July 1999, Denver, Colorado.  pp.37-43,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3775
3.

Conference Proceedings
Conference Proceedings
3. Implementation of a major hardware and software upgrade in a hospital-wide PACS during clinical use
Strickland,N.H. ; Allison,D.J. ; Beam,K.W. ; Deshaies,M.J. ; Fitzpatrick,M. ; Gardener,G. ; Martin,N. ; Phillp,J. ; Prenzno,T.W. ; Turner,J.E. ; West,M.
Pub. info.: Medical Imaging 1998: PACS Design and Evaluation: Engineering and Clinical Issues.  pp.496-499,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3339