1.

Conference Proceedings
Conference Proceedings
1. Multiple Steady States in Distillation: Interaction of Design and Control
Guettinger, T. ; Wells, G. ; Dorn, C. ; Schreiber, D. ; Morari, M.
Pub. info.: AIChE ANNUAL MEETING - NOVEMBER 16-21, 1997 - LOS ANGELES, CA.  1997.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1997
2.

Conference Proceedings
Conference Proceedings
2. Immersion specific defect mechanisms: findings and recommendations for their control [6154-180]
Kocsis, M. ; Van Den Heuvel, D. ; Gronheid, R. ; Maenhoudt, M. ; Vangoidsenhoven, D. ; Wells, G. ; Stepanenko, N. ; Benndorf, M. ; Kim, H. W ; Kishimura, S. ; Ercken, M. ; Van Roey, F. ; O’Brien, S. ; Fyen, W. ; Foubert, P ; Moerman, R ; Streefkerk, B.
Pub. info.: Optical Microlithography XIX.  pp.615409-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
3.

Conference Proceedings
Conference Proceedings
3. Optical path and image performance monitoring of a full-field 157-nm scanner
Wells, G. ; Hermans, J. ; Watso, R. ; Kang, Y.-S. ; Morton, R. ; Kocsis, M.K. ; Okoroanyanwu, U. ; De Bisschop, P. ; Stepanenko, N. ; Ronse, K.G.
Pub. info.: Optical Microlithography XVII.  pp.91-98,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377