1.

Conference Proceedings
Conference Proceedings
1. CLEANING PROCEDURES FOR UHV CLUSTER-TOOL MOS FABRICATION
Sofield, C.J. ; Murrell, M.P. ; Sugden, S. ; Heyns, M. ; Verhaverbecke, S. ; Welland, M.E. ; Golan, B. ; Barnes, J.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.105-112,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. CARBON-SILICON HETEROJUNCTION DIODES FORMED BY CH4/Ar RF PLASMA THIN FILM DEPOSITION ON Si SUBSTRATES
Amaratunga, G.A.J. ; Milne, W.I. ; Putnis, A. ; Chan, K.K. ; Clay, K.J. ; Welland, M.E.
Pub. info.: Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.377-382,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 162
3.

Conference Proceedings
Conference Proceedings
3. SCANNING TUNNELING MICROSCOPE STUDY ON AMORPHOUS AND CRYSTALLIZED CoSi2 FILMS
Kuwabara, M. ; Smith, D.A. ; Welland, M.E.
Pub. info.: Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A..  pp.615-620,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 202
4.

Conference Proceedings
Conference Proceedings
4. Nanopatterning of spin-coatable TiO2 resist using an electron beam
Saifullah, M.S. ; Welland, M.E.
Pub. info.: Advances in Resist Technology and Processing XX.  1  pp.513-523,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039