1.

Conference Proceedings
Conference Proceedings
1. IMPROVED PLANARIZATION FOR A SOG ETCHBACK PROCESS BY MODIYING THE PECVD OXIDE FILM
Weling, Milind ; Jain, Vivek
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.335-340,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
2.

Conference Proceedings
Conference Proceedings
2. Impact of Absorption Coefficient and Diffusion Length on the Choice of Materials for Sensing Wavelength
Weling, Milind ; Malhotra, Vinod
Pub. info.: Proceedings of the Symposium on Chemical Sensors II.  pp.386-393,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-7
3.

Conference Proceedings
Conference Proceedings
3. CMP Integration Issues for Sub-0.l5μm Process Technologies
Weling, Milind ; Dunton, Vance ; Zhang, Liming ; Annapragada, Rao
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.517-533,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37
4.

Conference Proceedings
Conference Proceedings
4. Some Aspects of Tungsten CMP Process with a Ferric Containing Slurry
Zhang, Liming ; Cecchi, Michele ; Weling, Milind ; Tafari, Tekle
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.322-332,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37