Savin, W. ; Weir, B. E. ; Katz, A. ; Chu, S. N. G. ; Nakahara, S. ; Harris, D. W.
Pub. info.:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.227-232, 1990. Pittsburgh, Pa.. Materials Research Society
Alers, G. B. ; Monroe, D. ; Krisch, K. S. ; Weir, B. E. ; Chang, A. M.
Pub. info.:
Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.311-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Weir, B. E. ; Silverman, P. J. ; Alers, G. B. ; Monroe, D. ; Alam, M. A. ; Sorsch, T. W. ; Green, M. L. ; Timp, G. L. ; Ma, Y. ; Frei, M. ; Liu, C. T. ; Bude, J. D. ; Krisch, K. S.
Pub. info.:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.301-, 1999. Warrendale, PA. MRS - Materials Research Society
Sapjeta, J. ; Green, M. L. ; Chang, J. P. ; Silverman, P. J. ; Sorsch, T. W. ; Weir, B. E. ; Gladden, W. ; Ma, Y. ; Sung, C. Y. ; Lennard, W. N.
Pub. info.:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.289-, 1999. Warrendale, PA. MRS - Materials Research Society
Katz, A. ; Dautremont-Smith, W. C. ; Chu, S. N. G. ; Pearton, S. J. ; Geva, M. ; Weir, B. E. ; Thomas, P. M. ; Kimerling, L. C.
Pub. info.:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.401-410, 1990. Pittsburgh, Pa.. Materials Research Society
Sapjeta, J. ; Boone, T. ; Rosamilia, J. M. ; Silverman, P. J. ; Sorsch, T. W. ; Timp, G. ; Weir, B. E.
Pub. info.:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.203-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society