1.

Conference Proceedings
Conference Proceedings
1. Micromachining inertial instruments
Weinberg,M.S. ; Bernstein,J. ; Borenstein,J.T. ; Campbell,J. ; Cousens,J. ; Cunningham,R.K. ; Fields,R. ; Greiff,P. ; Hugh,B. ; Niles,L. ; Sohn,J.B.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.26-36,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879
2.

Conference Proceedings
Conference Proceedings
2. Miniature silicon electronic biological assay chip and applications for rapid battlefield diagnostics
Cunningham,B.T. ; Regan,R.A. ; Clapp,C. ; Hildebrant,E. ; Weinberg,M.S. ; Williams,J.
Pub. info.: Battlefield biomedical technologies : 6 April 1999, Orlando, Florida.  pp.26-34,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3712
3.

Conference Proceedings
Conference Proceedings
3. Chemical vapor detection using microfabricated flexural plate silicon resonator arrays
Cunningham,B.T. ; Kant,R. ; Daly,C. ; Weinberg,M.S. ; Pepper,J.W. ; Clapp,C. ; Bousquet,R. ; Hugh,B.
Pub. info.: Chemical and biological sensing : 24-25 April 2000, Orlando, USA.  pp.151-162,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4036
4.

Conference Proceedings
Conference Proceedings
4. Characterization of membrane curvature in micromachined silicon accelerometers and gyroscopes using optical interferometry
Borenstein,J.T. ; Greiff,P. ; Sohn,J.B. ; Weinberg,M.S.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.116-125,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879