1.
|
Conference Proceedings
|
Nikolic, B. ; Wild, B. ; Dai, V. ; Shroff, Y.A. ; Warlick, B. ; Zakhor, A. ; Oldham, W.G.
Pub. info.: |
Emerging Lithographic Technologies VIII. pp.1092-1099, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5374 |
|
2.
|
Conference Proceedings
|
Warlick, B. ; Nikolic, B.
Pub. info.: |
Emerging Lithographic Technologies VIII. pp.619-627, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5374 |
|