1.

Conference Proceedings

Conference Proceedings
Nikolic, B. ; Wild, B. ; Dai, V. ; Shroff, Y.A. ; Warlick, B. ; Zakhor, A. ; Oldham, W.G.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.1092-1099,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374
2.

Conference Proceedings

Conference Proceedings
Warlick, B. ; Nikolic, B.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.619-627,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374