1.

Conference Proceedings
Conference Proceedings
1. Review of the history and technology of micromachined miniature displays using foundry-produced silicon backplanes
Walton,A.J. ; Vass,D.G. ; Underwood,I. ; Bodammer,G. ; Calton,D. ; Seunarine,K. ; Stevenson,J.T.M. ; Gundlach,A.
Pub. info.: Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.26-38,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3893
2.

Conference Proceedings
Conference Proceedings
2. Automated cost of ownership analysis for process development
Nilsen,V.K. ; Walton,A.J.
Pub. info.: Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland.  pp.112-120,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3742
3.

Conference Proceedings
Conference Proceedings
3. High-voltage resurf DMOS process development using covariance-based response surfaces
Redford,M. ; Fallon,M. ; Walton,A.J. ; Shafi,Z.A. ; McGinty,J. ; Underwood,I.
Pub. info.: Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland.  pp.76-86,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3742
4.

Conference Proceedings
Conference Proceedings
4. Integration of factory simulation with TCAD process and device simulation within a total TCAD approach to DFM
Nilsen,V.K. ; Walton,A.J.
Pub. info.: Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland.  pp.186-196,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3742
5.

Conference Proceedings
Conference Proceedings
5. Review of the history and technology of micromachined miniature displays using foundry-produced silicon backplanes
Walton,A.J. ; Vass,D.G. ; Underwood,I. ; Bodammer,G. ; Calton,D. ; Seunarine,K. ; Stevenson,J.T.M. ; Gundlach,A.
Pub. info.: Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia.  pp.26-38,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3891
6.

Conference Proceedings
Conference Proceedings
6. Review of the history and technology of micromachined miniature displays using foundry-produced silicon backplanes
Walton,A.J. ; Vass,D.G. ; Underwood,I. ; Bodammer,G. ; Calton,D.W. ; Seunarine,K. ; Stevenson,J.T.M. ; Gundlach,A.M.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.26-38,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892
7.

Conference Proceedings
Conference Proceedings
7. Automated redundant via placement for increased yield and reliability
Allan,G.A. ; Walton,A.J.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III.  pp.114-125,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3216
8.

Conference Proceedings
Conference Proceedings
8. Sampling-based yield prediction for ULSI
Allan,G.A. ; Walton,A.J.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II.  pp.198-209,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2874
9.

Conference Proceedings
Conference Proceedings
9. Photolithography expert system for improved estimation of IC critical area
Chia,M.P.C. ; Allan,G.A. ; Walton,A.J.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV.  pp.74-81,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3510