1.

Conference Proceedings
Conference Proceedings
1. A Novel Full-Quartz Open Cluster Platform for Advanced Rapid Thermal Processing
Bremensdorjer, R. ; Walk, H. ; Merz, E. ; Paul, S.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.407-418,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
2.

Conference Proceedings
Conference Proceedings
2. Simulation of Rapid Thermal Annealed Boron Ultrashallow Junctions in Inert and Oxidizing Ambient
Lerch, W. ; Gluck, M. ; Stolwijk, N. A. ; Walk, H. ; Schafer, M. ; Marcus, S. D. ; Downey, D. F. ; Chow, J. W. ; Marquardt, H.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.237-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
3.

Conference Proceedings
Conference Proceedings
3. THIN GATE OXIDE USING A NEW RTO/-N CLUSTERABLE REACTOR
Walk, H. ; Deutschmann, L. ; Martin, F. ; Masurel, C. ; Bauer, A.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.175-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342