1.

Conference Proceedings
Conference Proceedings
1. CAD tool environment for MEMS process design support
Schmidt, T. ; Wagener, A. ; Popp, J. ; Hahn, K. ; Bruck, R.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.318-325,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
2.

Conference Proceedings
Conference Proceedings
2. Technology interfaces to microsystem and nanoelectronic processes
Schmidt, T. ; Wagener, A. ; Popp, J. ; Hahn, K.
Pub. info.: Smart structures, devices, and systems II : 13-15 December 2004, Sydney, Australia.  pp.288-296,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5649
3.

Technical Paper
Technical Paper
3. Hardware-in-the-Loop Test Systems for Electric Motors in Advanced Powertrain Applications.
Wagener, A. ; Schulte, T. ; Waeltermann, P. ; Schuette, H.
Pub. info.: 2007 SAE world congress : technical paper.  2007.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2007
4.

Conference Proceedings
Conference Proceedings
4. MEMS fabrication process management environment
Popp, J. ; Schmidt, T. ; Wagener, A. ; Hahn, K.
Pub. info.: Micromachining and Microfabrication Process Technology X.  pp.148-158,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5715
5.

Conference Proceedings
Conference Proceedings
5. Process management and design for MEMS and microelectronics technologies
Hahn, K. ; Popp, J. ; Wagener, A.
Pub. info.: Microelectronics: Design, Technology, and Packaging.  pp.322-330,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5274
6.

Conference Proceedings
Conference Proceedings
6. Process design environment for microfabrication technologies
Wagener, A. ; Popp, J. ; Hahn, K.
Pub. info.: Micromachining and Microfabrication Process Technology IX.  pp.229-238,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5342
7.

Conference Proceedings
Conference Proceedings
7. Process design and tracking support for MEMS [6109-08]
Wagener, A. ; Schmidt, T. ; Popp, J. ; Hahn, K. ; Bruck, R. ; Ortloff, D.
Pub. info.: Micromachining and Microfabrication Process Technology XI.  pp.610908-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6109